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Develop the Next Breakthrough

Liquid Vaporizers, Filters, and Liquid Flow Controllers for CVD/ALD Thin Film Deposition

MSP Vapor Deposition Solutions

Our Turbo-Vaporizers

Develop the Next Breakthrough

Used world-wide, MSP's Turbo-Vaporizer transitions liquids into gases so they can be used for gas phase processes. This vapor deposition tool is ideal for any application which requires a high quality, stable vapor. They are used primarily in thin film deposition by:

  • CVD (Chemical Vapor Deposition)
  • PECVD (Plasma-Enhanced Chemical Vapor Deposition)
  • MOCVD (Metal-Organic Chemical Vapor Deposition)
  • ALD (Atomic Layer Deposition)

It is both a droplet vaporizer and a direct liquid injection vaporizer (DLI Vaporizer). The Turbo-Vaporizer™ design applies advanced aerosol science and thermo-dynamics to create a more precise solution for liquid source vaporization.

While other vaporizers have difficulty vaporizing thermally sensitive liquids or liquids with low vapor pressure, MSP's Turbo-Vaporizer successfully vaporizes them into a very stable concentration output with easily adjustable liquid flow rates. It also features a wide process window, producing lower and higher vapor concentrations than other vaporizers.

Our Performance Enhanced (PE) Turbo-Vaporizers provide even higher performance and increased precision to vaporize your liquid precursors. It:

  • Reduces atomized droplet size
  • Increases temperature stability
  • Allows some models to operate up to 300°C
  • Improves thin film deposition quality and thickness uniformity
  • Reduces response time

MSP’s vapor deposition systems more completely vaporize your liquid precursors, leading to more uniform thin film depositions, denser films, and films with more resistance to plasma-induced damage. To read more about optimizing your liquid source vaporization, take a look at our white paper.

 

MSP’s Vapor Delivery Solutions Family

MSP, a division of TSI, provides unique, innovative solutions for vapor delivery. Our liquid delivery system products are primarily used as components or accessories for CVD, PECVD, MOCVD, and ALD systems.

MSP DLI Vaporizor MSP Vapor Deposition Filters MSP CVD and ALD Liquid Flow Controllers
DLI Vaporizers
Filters
Liquid Flow Controllers

Highly precise, reliable vapor deposition devices enabling efficient processes, even with difficult to use liquids.

  • Low heat vaporization

  • Long-term stable operation
  • Wide process window

The unique design of these filters provides extremely low pressure drop—a must for low pressure processes.

  • Extremely low pressure drop
  • Ultra-high efficiency
  • 100% stainless steel construction

MSP’s Liquid Flow Controllers were developed specifically for ALD & CVD applications.

  • Extremely fast response time
  • Self-learning, leading to improved control
  • Zoned PID values providing multiple set-points with optimal control

 

To learn more about MSP Vapor Deposition Solutions, please fill out this form and we will get back to you!

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