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Semiconductor Manufacturing

Sub-micrometer contamination control that works

Semiconductor Manufacturing

Sub-Micrometer Contamination Control that Works

Semiconductor node scales continue to decrease to single-digit nanometer dimensions. Monitoring sub-micrometer airborne particle contamination is vital to ensure high product yield. You need instruments that provide the best measurement and data to help keep your processes in control.

TSI is a recognized leader in high-sensitivity particle counting. Our instruments are used in national standards laboratories worldwide. Improve your fabrication process by monitoring sub-micrometer and nanoparticles with TSI’s industry leading particle counters. 

Reliable, high-sensitivity particle counting instruments that work

Cleanroom particle monitoring has never been so easy

  • Semiconductor Cleanroom Classification. All TSI AeroTrak Portable Particle Counters are designed to simplify and speed up the cleanroom classification process. With ISO 14644-1 reporting built-in, TSI particle counting instruments are simple to setup and easy to use.

  • Perodic Particle Monitoring in a Semiconductor Space. All TSI AeroTrak Portable Particle Counters operate as standalone instruments or as part of a facility monitoring system to perform simple periodic airborne particle monitoring in a semiconductor environment for real-time detection of contaminants.

  • Continuous Monitoring of Semiconductor Tools and Processes. TSI FMS Software (with OPC UA Client/Server functionality) seamlessly integrates a range of instruments, including TSI AeroTrak Portable Particle Counters, TSI AeroTrak Remote Particle Counters, and environmental sensors. Combined with the best-in-class features of TSI FMS Software, including OPC UA Client/Server, distributed databases, and hot standby, TSI provides the unparalleled flexibility and reliability for different information technology systems and software applications to communicate, exchange data, and use the information that has been exchanged to continuously monitor semiconductor manufacturing cleanrooms.

Quickly identify what cleanroom particle counter you need

Model Flow Rate Particle Size Range With Integrated Pump
Cleanroom Condensation Particle Counter
9001 0.1 CFM (2.83 LPM) Min. Detectable Particle (D50) - 10 nm
Max. Detectable Particle - >3 µm
Cleanroom Remote Particle Counters
6310 1 CFM (28.3 LPM) ±5% accuracy 0.3 to 25.0 μm X
7110 1 CFM (28.3 LPM) ±5% accuracy 0.100 to 10.0 µm  
7201 0.1 CFM (2.83 LPM) ±5% accuracy 0.2 to 10.0 µm  
7301 0.1 CFM (2.83 LPM) ±5% accuracy 0.3 to 25.0 µm  
7310 1 CFM (28.3 LPM) ±5% accuracy 0.3 to 25.0 µm  
Cleanroom Portable Particle Counter
9110 1 CFM (28.3 LPM) ±5% accuracy 0.100 to 10.0 µm  


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