On Friday, December 6, Professor Rajesh Rajamani pre...
Hong He, Professor and Chief Scientist at the Center...
Medical devices are transforming healthcare and medical technology. Advancements in medical device technology are allowing people to live longer and have a higher quality of life. Often medical device fabrication requires nanometer- or micron-thick thin films that are deposited via CVD (Chemical Vapor Deposition). CVD is a gas phase process. When CVD chemistry requires the use of a material that is typically in liquid form, a vaporizer is used to phase-change the liquid into a gas.
MSP, a Division of TSI, provides leading technology tools to vaporize liquid precursors for thin film deposition or other processes like gas-phase metal etch or epitaxial growth. We are a leader in the liquid source vaporization market, providing higher quality vapors which can lead to greater throughput and higher yield by providing improved thin films, wider process windows, higher achievable vapor concentrations, less risk of thermal decontamination, and decreased downtime.
Processes which require vapor created from a liquid cover an extremely wide spectrum of process conditions. Several important process parameters that affect vaporization include:
MSP offers the widest range of standard vaporizer solutions commercially available. Every year our MSP vaporization experts continue to innovate and drive vaporization technology to new heights to meet the demands of progressively challenging process requirements. With 40+ active designs patents, MSP continues to be a leader in vapor delivery solutions.
MSP provides three key components of a vaporization system: vaporizers, vapor filters, and liquid flow controllers.
MSP's exclusive technology offers a broad range of advantages over older, more conventional techniques. Our Turbo-Vaporizers apply advanced technology in aerosol science and thermo-dynamics to create a more refined solution to vaporization.
In thin film applications, the stable and uniform vapor leads to a higher quality thin film. The precision and control of MSP vaporizers make it possible to vaporize difficult precursors, which were not usable before, opening up new areas for process development. The ability to generate higher vapor concentrations with less maintenance than conventional techniques provides higher deposition rates and lower downtime.
MSP provides nine direct liquid injection vaporizer options to meet varying applications. The vaporizers are ideal for process that require a high quality, stable vapor. A few applications include:
Unwanted particles can mean low yield and field failure. Best practice is to use a filter downstream of vapor and gas sources for risk mitigation. MSP’s patent-protected VPG™ Vapor Process Gas filters provide ultra-high efficiency in the nanometer size range while also creating minimal pressure drop. These 100% Stainless Steel filters are thermally and chemically resistant.
MSP’s Turbo-Vaporizer™ Vapor Deliver Solutions use a direct liquid injection technique and require precise control of the liquid flow rate entering the vaporizer. A fast response liquid flow controller that can tightly control flow-rates is needed for most microelectronic and thin film applications. Our PE vaporizers use a precision Piezo-valve to control the rate of liquid flow to the vaporizer, significantly reducing dead volume and improving response time. MSP’s versatile Liquid Flow Controller can be used to control the on-board Piezo valve in PE vaporizers. It can be used to maintain a highly stable liquid flow, or generate repeatable short duration vapor pulses for ALD (Atomic Layer Deposition) and short pulse CVD applications.