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Low-Flow Turbo II Vaporizer 2852PE

SKU: 2852PE

MSP's Turbo II™ Vaporizer 2852PE is designed for high-precision microelectronic applications that require low to mid vapor flow rates. Based off of the field proven, highly reliable, and low maintenance MSP Turbo™ Vaporizers, the new 2852PE provides stable vapor concentrations while maintaining a very small footprint. The 2852PE also features an on-board flow control valve for extremely fast flow-rate response.

Product Details

Dimensions (HxWxD)

198 mm x 79 mm x 114 mm (7.8 inch x 3.1 inch x 4.5 inch)
Weight 2.5 kg (5.6 lb)
Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 in. VCR female split nut
Compressed Air 4 mm instant tube fitting
Wetted Parts SS 316, PEEK, PTFE, Elgiloy®, FFKM
Leak Integrity ≤ 1x 10-8 Pa·m3/s Helium
Heater Power Requirements1 208 VAC, 60 Hz, 450 W
Carrier Gas Inert gas recommended
Max Carrier Gas Flow1 2.0 standard liters/min N2 @ 50 psig
Max Liquid Flow2 7 g/min (TEOS or equivalent)
System Pressure Limit 150 psig
Compressed Air 90 to 110 psig
Temperature Range3 40°C to 180°C
Temperature Sensor 2 type Ƙ thermocouples

Specifications subject to change without notice.

1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information.
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer.
3 Appropriate venting is required.

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