This website uses cookies
The web site is now storing only essential cookies on your computer. If you don't allow cookies, you may not be able to use certain features of the web site including but not limited to: log in, buy products, see personalized content, switch between site cultures. It is recommended that you allow all cookies.
800-680-1220 / +1 651-490-2860 (US) All Locations


Electronics Manufacturing

Improve yield and reduce waste with TSI Cleanroom Particle Counters

Electronics Manufacturing

Improve yield and reduce waste with TSI Cleanroom Particle Counters

Critical in electronics manufacturing is to improve yield and reduce waste by eliminating sources of contamination. This can be done using real-time airborne particle counters to detect particulates that are sources of cleanroom contamination. Immediate corrective action is critical to increasing product yield and reducing cleanroom operational costs.

TSI AeroTrak® Remote Particle Counters are ideal for detecting airborne contamination in real time in your facility. TSI provides the right instruments for the job, from classification to continuous monitoring. Let our experience work for you.

Real-time airborne particle counters save time and money

  • Choose the Right Instruments for Your Process. TSI AeroTrak Remote Particle Counters are supplied in a variety of particle size sensitivities. They are highly reliable and cost-effective instruments that measure particles down to 0.2 μm, 0.3 μm and 0.5 μm. It is important to choose the right particle counter to suit your process.

  • Simplify Continuous Monitoring. TSI AeroTrak Remote Particle Counter Models 6310 and 6510 with internal vacuum pumps make installation easy and remove the need for an external vacuum system.

  • Classify with Confidence. TSI AeroTrak Portable Particle Counter Models 9510 and 9310 are easy to use and have the flow rates needed to get classifications done quickly and correctly.

Cleanroom particle monitoring has never been so easy

  • Electronics Cleanroom Classification. All TSI AeroTrak Portable Particle Counters are designed to simplify and speed up the electronics cleanroom classification process. TSI particle counting instruments are simple to setup and easy to use, with ISO 14644-1 reporting built-in.

  • Periodic Monitoring of an Electronics Cleanroom. All TSI AeroTrak Portable Particle Counters operate as standalone instruments or are integrated into a facility monitoring system for periodic monitoring of an electronics manufacturing environment.

  • Continuous Monitoring of an Electronics Cleanroom. TSI FMS Software (with OPC UA Client/Server functionality) seamlessly integrates a range of instruments, including TSI AeroTrak Portable Particle Counters, TSI AeroTrak Remote Particle Counters, and environmental sensors. With best in class features, such as OPC UA Client/Server, distributed databases, and hot standby, TSI FMS Software delivers the flexibility and reliability for different IT systems and software applications to communicate and exchange data, and use the data to continuously monitor electronics manufacturing cleanrooms.

Quickly identify what cleanroom particle counter you need

Model Flow Rate Particle Size Range With Integrated Pump
Cleanroom Remote Particle Counters
6310 1 CFM (28.3 LPM) ±5% accuracy 0.3 to 25.0 μm X
6510* 1 CFM (28.3 LPM) ±5% accuracy 0.5 to 25.0 μm X
7301 0.1 CFM (2.83 LPM) ±5% accuracy 0.3 to 25.0 µm  
7301-P 0.1 CFM (2.83 LPM) 0.3 to 50.0 µm X
7310 1 CFM (28.3 LPM) ±5% accuracy 0.3 to 25.0 µm  
7501 0.1 CFM (2.83 LPM) ±5% accuracy 0.5 to 25.0 μm  
7510* 1 CFM (28.3 LPM) ±5% accuracy 0.5 to 25.0 μm  
Cleanroom Portable Particle Counters
9310 1 CFM (28.3 LPM) ±5% accuracy 9310-02, 9310: 0.3 to 25.0 µm  
9510 1 CFM (28.3 LPM) ±5% accuracy 9510-02, 9510: 0.5 to 25.0 µm  
Cleanroom Handheld Particle Counters
9303 0.1 CFM (2.83 LPM) 0.3 to 25.0 µm  
9306 0.1 CFM (2.83 LPM) ±5% accuracy 0.3 to 25.0 µm  

*VHP-resistant models available


Connect with TSI


News & Press

Read the latest news about TSI and industries we serve.

View All News


Events & Shows

We are at the industry events important to you.

View all Events


Grow with TSI

We encourage curiosity and critical thinking. Browse TSI jobs.

Explore TSI Careers


Patents & Awards

TSI researchers and engineers hold more than 50 patents.

Browse TSI's Patents